Concepedia
Statistics
Publications
6
Citations
94
H-Index
Active since
1986
Affiliations
Hitachi (Japan)(Current)
Hitachi High-Tech (Japan)
Anto Yasaka is an author at Hitachi (Japan) specializing in materials science, materials engineering, and mask repair.
Publications per year
1986–2017
Development of new FIB technology for EUVL mask repair
Fumio Aramaki, Takashi Ogawa, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 32 citations
Engineering, Materials Engineering, Materials Science +11
Photomask repair technology by using gas field ion source
Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations
Engineering, Materials Engineering, Materials Science +12
Study of EUVL mask defect repair using FIB-GAE method
Tsuyoshi Amano, Yasushi Nishiyama, Hiroyuki Shigemura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +15
Performance of GFIS mask repair system for various mask materials
Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations
Engineering, Materials Engineering, Materials Science +13
Submicron Mask Repair Using Focused Ion Beam Technology
Masahiro Yamamoto, Mitsuyoshi Sato, Hideaki Kyogoku et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1986 · 11 citations
Engineering, Electrical Engineering, Materials Science +13
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