3
Publications
38
Citations
3
H-Index
2018
Active since
Affiliations
Guy Dawson is an author at Nano-C (United States) specializing in microelectronics, materials science, and instrumentation.
Top concepts
EngineeringApplied PhysicsInstrumentationOptoelectronicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringElectrical Engineering
Publications per year
2018–2018
3
3
High-resolution EUV lithography using a multi-trigger resist
Alex P. G. Robinson, Carmen Popescu, Dimitrios Kazazis et al. · 2018 · 13 citations · Full text
Multi-trigger resist patterning with ASML NXE3300 EUV scanner
Alex P. G. Robinson, Yannick Vesters, Alexandra McClelland et al. · 2018 · 11 citations
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