Statistics
Publications
3
Citations
72
H-Index
3
Active since
2008
Affiliations
Toshiba (Japan)(Current)
Takeshi Koshiba is an author at Toshiba (Japan) specializing in nanoimprint lithography, materials science, and imprint lithography.
Publications per year
2008–2009
3
3
Study of nanoimprint lithography for applications toward 22nm node CMOS devices
Ikuo Yoneda, Shinji Mikami, Takumi Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 47 citations
Engineering, Computer Engineering, Electrical Engineering +13
A study of filling process for UV nanoimprint lithography using a fluid simulation
Ikuo Yoneda, Yasutada Nakagawa, Shinji Mikami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 15 citations
Engineering, Manufacturing Engineering, Materials Science +12
1–3 of 3