Christoph Zaczek

Nucleation and Growth of Crystalline Silicon Films on Glass for Solar Cells

Ralf B. Bergmann, Jürgen Köhler, R. Dassow et al. · physica status solidi (a) · 1998 · 60 citations

Si Films, Optical Materials, Engineering +18

Low-temperature Si epitaxy with high deposition rate using ion-assisted deposition

Ralf B. Bergmann, Christoph Zaczek, N. Jensen et al. · Applied Physics Letters · 1998 · 30 citations

Materials Science, Semiconductor Technology, Electrical Engineering +13

Coatings for next generation lithography

Christoph Zaczek, S. Müllender, H. Enkisch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

Optical Materials, Engineering, Electron-beam Lithography +23

Deep ultraviolet out-of-band contribution in extreme ultraviolet lithography: predictions and experiments

Gian F. Lorusso, Natalia Davydova, Mark Eurlings et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations

Photonics, Electrical Engineering, Ultraviolet Light +15

Metal fluoride coatings prepared by ion-assisted deposition

Martin Bischoff, M. Sode, Dieter Gäbler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations