Masahiro Kishimoto

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Active since

2010

Affiliations

Lawrence Berkeley National Laboratory(Current)

Masahiro Kishimoto is an author at Lawrence Berkeley National Laboratory specializing in extreme ultraviolet lithography, native defects, and manufacturing defects.

Publications per year

2010–2010

Publications

A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection

Sungmin Huh, Liping Ren, David Y. Chan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +15

Study of real defects on EUV blanks and a strategy for EUV mask inspection

Sungmin Huh, Abbas Rastegar, Stefan Wurm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +17

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