R. Gunn

Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

Suhana Mohamed Sultan, Owain Clark, Taha Ben Masaud et al. · Microelectronic Engineering · 2012 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +16

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Arnim Höchst, R. Scheuerer, H. Stahl et al. · Sensors and Actuators A Physical · 2004 · 29 citations

Engineering, Materials Engineering, Materials Science +17

Effect of atomic layer deposition temperature on the performance of top-down ZnO nanowire transistors

Suhana Mohamed Sultan, Nonofo M.J. Ditshego, R. Gunn et al. · Nanoscale Research Letters · 2014 · 24 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD

Suhana Mohamed Sultan, Kai Sun, Owain Clark et al. · IEEE Electron Device Letters · 2011 · 23 citations

Engineering, Electrical Engineering, Materials Science +17

Nucleation and Growth of Platinum Films on High-k/Metal Gate Materials by Remote Plasma and Thermal ALD

Qi Fang, Chris Hodson, Cigang Xu et al. · Physics Procedia · 2012 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17