Concepedia

Chris Hodson

CH

Statistics

Publications

4

Citations

62

H-Index

4

Active since

2005

Affiliations

Oxford Instruments (United Kingdom)(Current)

Chris Hodson is an author at Oxford Instruments (United Kingdom) specializing in thin-film deposition, materials science, and thin-film materials.

Publications per year

2005–2021

4

Publications

4

Plasma deposition of thin films

Hai-Shan Zhou, C. Sim, Andrew Glidle et al. · ENLIGHTEN (Jurnal Bimbingan dan Konseling Islam) · 2005 · 21 citations

, , +11

Nucleation and Growth of Platinum Films on High-k/Metal Gate Materials by Remote Plasma and Thermal ALD

Qi Fang, Chris Hodson, Cigang Xu et al. · Physics Procedia · 2012 · 16 citations · Full text

, , +17

Innovative remote plasma source for atomic layer deposition for GaN devices

Harm C. M. Knoops, Karsten Arts, Jan W. Buiter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 14 citations · Full text

, , +17

Plasma-enhanced atomic layer deposition and etching of high-<i>k</i> gadolinium oxide

Steven A. Vitale, P.W. Wyatt, Chris Hodson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 11 citations

, , +17

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