Concepedia

Yemin Tang

YT

4

Publications

124

Citations

4

H-Index

2013

Active since

Affiliations

University of Michigan(Current)

Yemin Tang is an author at University of Michigan specializing in microfabrication, engineering, and microelectronics.

Top concepts

EngineeringMicrofabricationMicroelectronicsElectrical Engineering3D PrintingSensor DesignApplied PhysicsSensor TechnologyBiomedical SensorsIntegrated Circuits

Publications per year

2013–2018

4

Publications

4

Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process

Yemin Tang, A Sandoughsaz, Kevin J. Owen et al. · Journal of Microelectromechanical Systems · 2018 · 80 citations

Engineering, Electron-beam Lithography, Long Drie Process +19

High aspect-ratio low-noise multi-axis accelerometers made from thick silicon

Yemin Tang, Khalil Najafi · 2016 · 15 citations

Engineering, New Type, Accelerometer +18

Ultra high aspect-ratio and thick deep silicon etching (UDRIE)

Yemin Tang, A Sandoughsaz, Khalil Najafi · 2017 · 15 citations

Electrical Engineering, Wafer Scale Processing, Engineering +14

Technology for fabricating dense 3-D microstructure arrays for biomimetic hair-like sensors

Yemin Tang, Rebecca L. Peterson, K. Najafi · 2013 · 14 citations

Engineering, Biomimetic Materials, Mechanical Engineering +22

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