Neung-Kyung Yu

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects

Yohei Kotsugi, Seung‐Min Han, Youn‐Hye Kim et al. · Chemistry of Materials · 2021 · 62 citations

Engineering, Thin Film Process Technology, Chemistry +18

Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

Chi Thang Nguyen, Eun-Hyoung Cho, Bonwook Gu et al. · Nature Communications · 2022 · 30 citations · Full text

Evaluation of silicon tetrahalide precursors for low-temperature thermal atomic layer deposition of silicon nitride

Neung-Kyung Yu, Chan Hui Moon, Jeongwoo Park et al. · Applied Surface Science · 2021 · 19 citations

Materials Science, Materials Engineering, Engineering +11

Chemical mechanism of oxidative etching of ruthenium: Insights into continuous versus self-limiting conditions

Neung-Kyung Yu, Jeong‐Min Lee, Woo‐Hee Kim et al. · Applied Surface Science · 2023 · 12 citations