Concepedia

Bonwook Gu

BG

Statistics

Publications

10

Citations

278

H-Index

10

Active since

2020

Affiliations

Incheon National University(Current)

Hongik University

Ajou University

Samsung (South Korea)

Leipzig University

Bonwook Gu is an author at Incheon National University specializing in materials science, natural sciences, and atomic layer deposition.

ORCID

Publications per year

2020–2025

10

Publications

10

Effects of Al Precursors on Deposition Selectivity of Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> Using Ethanethiol Inhibitor

Hyun Gu Kim, Miso Kim, Bonwook Gu et al. · Chemistry of Materials · 2020 · 87 citations

, , +17

Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

Chi Thang Nguyen, Eun-Hyoung Cho, Bonwook Gu et al. · Nature Communications · 2022 · 34 citations · Full text

, , +17

Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> with a Series of Al(CH<sub>3</sub>)<sub><i>x</i></sub>Cl<sub>3–<i>x</i></sub> and Al(C<sub><i>y</i></sub>H<sub>2<i>y</i>+1</sub>)<sub>3</sub> Precursors

Il‐Kwon Oh, Tania E. Sandoval, Tzu‐Ling Liu et al. · Journal of the American Chemical Society · 2022 · 33 citations

, , +17

Computational Modeling of Physical Surface Reactions of Precursors in Atomic Layer Deposition by Monte Carlo Simulations on a Home Desktop Computer

Bonwook Gu, Ngoc Le Trinh, Chi Thang Nguyen et al. · Chemistry of Materials · 2022 · 25 citations

, , +17

Growth modulation of atomic layer deposition of HfO<sub>2</sub> by combinations of H<sub>2</sub>O and O<sub>3</sub> reactants

Byeong Guk Ko, Chi Thang Nguyen, Bonwook Gu et al. · Dalton Transactions · 2021 · 22 citations

, , +17

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