Jae Uk Lee - Concepedia

Author

Jae Uk Lee

Also Known As

Jae Uk Lee, Sook Joung Lee

Publications

195

Citations

H-Index

Concepts

All Affiliations

Jae Uk Lee is an author at IMEC specializing in engineering, materials science, and biophysics.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	85
2	Medicine	2	2	51
3	Applied Physics	2	2	44
4	Electrical Engineering	2	2	39
5	Biomedical Engineering	1	1	18

Jae Uk Lee

Publications

Citations

H-Index

Page 1

	Year	Citations
EUV lithography imaging using novel pellicle membranes Ivan Pollentier, Johannes Vanpaemel, Jae Uk Lee, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyThin Film Process TechnologyBeam Lithography	2016	28
Novel membrane solutions for the EUV pellicle: better or not? Ivan Pollentier, Jae Uk Lee, Marina Y. Timmermans, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Membrane StructureEngineeringCarbon NanotechnologyCytoskeletonMembrane Fusion	2017	23
Properties and performance of EUVL pellicle membranes Emily Gallagher, Johannes Vanpaemel, Ivan Pollentier, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Membrane StructureEngineeringElectron-beam LithographyBiomedical EngineeringBeam Lithography	2015	18
CNT EUV pellicle: moving towards a full-size solution Johan Meersschaut, Olivier Richard, Marina Y. Timmermans, EngineeringCarbon-based MaterialNanoelectronicsCnt Euv PellicleNumerical Simulation	2017	16
Introducing the EUV CNT pellicle Jae Uk Lee, Johannes Vanpaemel, Ivan Pollentier, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2016	11

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