J. L. Shohet

The Helically Symmetric Experiment, (HSX) Goals, Design and Status

F. S. B. Anderson, A. F. Almagri, D. T. Anderson et al. · Fusion Technology · 1995 · 181 citations

Engineering, Hsx Device, Experimental Technology +22

Measurement of bandgap energies in low-k organosilicates

M. T. Nichols, W. Li, D. Pei et al. · Journal of Applied Physics · 2014 · 126 citations

Materials Science, Bandgap Energies, Engineering +15

Electron-density and energy distributions in a planar inductively coupled discharge

Leonard J. Mahoney, A. Wendt, Ernesto L. Barrios et al. · Journal of Applied Physics · 1994 · 117 citations

Engineering, Glow Discharge, Plasma Science +17

Plasma-aided manufacturing

J. L. Shohet · IEEE Transactions on Plasma Science · 1991 · 77 citations

Materials Science, Plasma-aided Manufacturing, Plasma Electronics +6

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

Mikhaı̈l R. Baklanov, V. Jousseaume, D. V. Lopaev et al. · Applied Physics Reviews · 2019 · 56 citations · Full text

Optical Materials, Engineering, General Behavior +24