Masaki Hirayama

Highly reliable ultrathin silicon oxide film formation at low temperature by oxygen radical generated in high-density krypton plasma

Ken‐Taro Sekine, Yuji Saito, Masaki Hirayama et al. · IEEE Transactions on Electron Devices · 2001 · 96 citations

Engineering, Silicon On Insulator, Plasma Processing +17

New era of silicon technologies due to radical reaction based semiconductor manufacturing

Tadahiro Ohmi, Masaki Hirayama, Akinobu Teramoto · Journal of Physics D Applied Physics · 2005 · 93 citations

Silicon Technologies, Engineering, Education +22

Very High Carrier Mobility for High-Performance CMOS on a Si(110) Surface

Akinobu Teramoto, T. Hamada, Masashi Yamamoto et al. · IEEE Transactions on Electron Devices · 2007 · 77 citations

Radical Oxidation, Electrical Engineering, High-performance Cmos +14

Impact of Improved High-Performance Si(110)-Oriented Metal–Oxide–Semiconductor Field-Effect Transistors Using Accumulation-Mode Fully Depleted Silicon-on-Insulator Devices

Weitao Cheng, Akinobu Teramoto, Masaki Hirayama et al. · Japanese Journal of Applied Physics · 2006 · 49 citations

Semiconductor Technology, Electrical Engineering, Conventional Fd-soi Pmos +12

Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation

T. Yamamoto, Nguyen Thang Chien, Makoto Ando et al. · Japanese Journal of Applied Physics · 1999 · 45 citations

Electrical Engineering, Plasma Electronics, Engineering +14