L. Liljeholm

Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media

Gunilla Wingqvist, Johan Bjurström, L. Liljeholm et al. · Sensors and Actuators B Chemical · 2006 · 161 citations

Acoustic Methods, Engineering, Microfabrication +6

Shear Mode AlN Thin Film Electroacoustic Resonator for Biosensor Applications

Gunilla Wingqvist, Johan Bjurström, L. Liljeholm et al. · 2006 · 34 citations

Engineering, Biosensor Consisting, Biomedical Engineering +16

Influence of the target composition on reactively sputtered titanium oxide films

Tomáš Kubart, Jens Jensen, Tomas Nyberg et al. · Vacuum · 2009 · 26 citations

Materials Science, Materials Engineering, Engineering +9

Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications

Gunjana Sharma, L. Liljeholm, Johannes Enlund et al. · Sensors and Actuators A Physical · 2010 · 25 citations

In-liquid Sensor Applications, Engineering, Microfabrication +9

Experiments and modeling of dual reactive magnetron sputtering using two reactive gases

Tomáš Kubart, D.H. Trinh, L. Liljeholm et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 21 citations

Materials Science, Magnetism, Chemical Engineering +14