Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media - Concepedia

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Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media

161

Citations

11

References

2006

Year

Gunilla Wingqvist, Johan Bjurström, L. Liljeholm, Ventsislav Yantchev, Ilia Katardjiev

Sensors and Actuators B Chemical

Acoustic MethodsEngineeringMicrofabricationMechanical EngineeringViscous MediaAcoustic SensorUltrasoundSensor TechnologyMicromachined Ultrasonic Transducer

References

	Year	Citations

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