Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications

Gunjana Sharma, L. Liljeholm, Johannes Enlund, Johan Bjurström, Ilia Katardjiev, Klas Hjort

Sensors and Actuators A Physical · 2010 · 25 citations · 26 references

Concepts

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