Concepedia

O. Kilpelä

OK

Statistics

Publications

8

Citations

301

H-Index

8

Active since

1997

Affiliations

Helsinki Institute of Physics(Current)

University of Helsinki

IMEC

KU Leuven

Ioffe Institute

O. Kilpelä is an author at Helsinki Institute of Physics specializing in materials science, materials engineering, and silicon materials.

Publications per year

1997–2002

8

Publications

8

Substrate-dependent crystallization and enhancement of visible photoluminescence in thermal annealing of Si/SiO2 superlattices

Leonid Khriachtchev, O. Kilpelä, S. Karirinne et al. · Applied Physics Letters · 2001 · 68 citations

, , +17

Raman scattering from very thin Si layers of Si/SiO2 superlattices: Experimental evidence of structural modification in the 0.8–3.5 nm thickness region

Leonid Khriachtchev, Markku Räsänen, O. Kilpelä et al. · Journal of Applied Physics · 1999 · 57 citations

, , +17

Development of sub-10-nm atomic layer deposition barriers for Cu/low-k interconnects

Gerald Beyer, A. Satta, Jörg Schuhmacher et al. · Microelectronic Engineering · 2002 · 44 citations

, , +14

Visible luminescence from Si/SiO2 superlattices

J. Sinkkonen, O. Kilpelä, S. V. Gastev · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 40 citations

, , +17

Optics of Si/SiO2 superlattices: Application to Raman scattering and photoluminescence measurements

Leonid Khriachtchev, O. Kilpelä · Journal of Applied Physics · 2000 · 39 citations

, , +17

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