Statistics
Publications
3
Citations
53
H-Index
3
Active since
1986
Affiliations
NTT Basic Research Laboratories(Current)
M. Kanai is an author at NTT Basic Research Laboratories specializing in x-ray lithography, engineering, and x-ray optics.
Publications per year
1986–1992
3
3
An advanced x-ray stepper for -μm SR lithography
Shuji Ishihara, Masanori Suzuki, M. Kanai et al. · Microelectronic Engineering · 1992 · 13 citations
Engineering, Manufacturing Engineering, Materials Science +5
1–3 of 3