Rakesh Kumar

High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices

Navab Singh, Ajay Agarwal, L. K. Bera et al. · IEEE Electron Device Letters · 2006 · 636 citations

Engineering, Integrated Circuits, Silicon On Insulator +19

A comparative study of low dielectric constant barrier layer, etch stop and hardmask films of hydrogenated amorphous Si-(C, O, N)

Yu-Hsing Wang, M.R. Moitreyee, Rakesh Kumar et al. · Thin Solid Films · 2004 · 68 citations

Materials Science, Materials Engineering, Engineering +10

Investigation of deposition temperature effect on properties of PECVD SiOCH low-k films

T.K.S. Wong, B. Liu, B Sabarish Narayanan et al. · Thin Solid Films · 2004 · 51 citations

Materials Science, Materials Engineering, Engineering +7

Three Dimensional Stress Mapping of Silicon Surrounded by Copper Filled through Silicon Vias Using Polychromator-Based Multi-Wavelength Micro Raman Spectroscopy

A. D. Trigg, Li Yu, Cheng Kuo Cheng et al. · Applied Physics Express · 2010 · 47 citations · Full text

Engineering, Silicon On Insulator, Interconnect (Integrated Circuits) +19

Determination of the hardness and elastic modulus of low-k thin films and their barrier layer for microelectronic applications

Kaiyang Zeng, Yihua Wang, Babu Narayanan et al. · Microelectronic Engineering · 2003 · 47 citations

Materials Science, Epitaxial Growth, Engineering +9