Concepedia

Robert Herring

RH

1

Publications

16

Citations

1

H-Index

2001

Active since

Robert Herring is an author specializing in applied physics, microfabrication, and materials engineering.

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Publications per year

2001–2001

1

Publications

1

LPCVD of Silicon Nitride from Dichlorosilane and Ammonia by Single Wafer Rapid Thermal Processing

Dana Teasdale, Yoshihide Senzaki, Robert Herring et al. · Electrochemical and Solid-State Letters · 2001 · 16 citations

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