Yoshihide Senzaki

Atomic layer deposition of hafnium oxide and hafnium silicate thin films using liquid precursors and ozone

Yoshihide Senzaki, Seung Park, Hood Chatham et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 102 citations

Materials Science, Hafnium Oxide, Chemical Engineering +13

Preparation of Strontium Ferrite Particles by Spray Pyrolysis

Yoshihide Senzaki, James Caruso, Mark J. Hampden‐Smith et al. · Journal of the American Ceramic Society · 1995 · 42 citations

Materials Science, Magnetism, Magnetic Properties +15

Chemical vapor deposition of ruthenium and osmium thin films using (hexafluoro-2-butyne)tetracarbonylruthenium and -osmium

Yoshihide Senzaki, Wayne L. Gladfelter, Fred B. McCormick · Chemistry of Materials · 1993 · 33 citations

Materials Science, Environmental Chemistry, Osmium Thin Films +15

MOCVD of high-k dielectrics, tantalum nitride and copper from directly injected liquid precursors

Yoshihide Senzaki, Arthur K. Hochberg, John A. T. Norman · Advanced Materials for Optics and Electronics · 2000 · 28 citations

Engineering, Thin Film Process Technology, Chemistry +18

Chemical vapor deposition of thin films of ruthenium and formation of an unexpected byproduct using hexafluoro-2-butynetetracarbonylruthenium(0)

Yoshihide Senzaki, Fred B. McCormick, Wayne L. Gladfelter · Chemistry of Materials · 1992 · 20 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +12