Statistics
Publications
2
Citations
30
H-Index
2
Active since
1973
Affiliations
R. Yim is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, instrumentation, and microfabrication.
Publications per year
1973–2017
2
2
Precision Electron Beam Microfabrication
F. S. Ozdemir, W. E. Perkins, R. Yim et al. · Journal of Vacuum Science and Technology · 1973 · 20 citations
Electrical Engineering, Engineering, Electron-beam Lithography +14
Chemical/mechanical balance management through pad microstructure in CMP
R. Yim, C. Perrot, V. Balan et al. · Microelectronic Engineering · 2017 · 10 citations
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