Concepedia

F. S. Ozdemir

FS

5

Publications

105

Citations

5

H-Index

1972

Active since

Affiliations

HRL Laboratories (United States)(Current)

F. S. Ozdemir is an author at HRL Laboratories (United States) specializing in electrical engineering, engineering, and microelectronics.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsMicroscopyMicrofabricationIntegrated CircuitsInstrumentationMaterial ScienceElectronic Packaging

Publications per year

1972–1979

5

Publications

5

Computer-controlled scanning electron microscope system for high-resolution microelectronic pattern fabrication

F. S. Ozdemir, E. D. Wolf, C Buckey · IEEE Transactions on Electron Devices · 1972 · 26 citations

Engineering, Electron-beam Lithography, Microscopy +17

MP-A1 Electron-beam fabricated GaAs FET inverter

P.T. Greiling, C.F. Krumm, F. S. Ozdemir et al. · IEEE Transactions on Electron Devices · 1978 · 26 citations

Electrical Engineering, Engineering, Gaas Fet Inverter +3

Composition and detection of alignment marks for electron-beam lithography

E. D. Wolf, P. Coane, F. S. Ozdemir · Journal of Vacuum Science and Technology · 1975 · 23 citations

Engineering, Electron-beam Lithography, Microscopy +22

Precision Electron Beam Microfabrication

F. S. Ozdemir, W. E. Perkins, R. Yim et al. · Journal of Vacuum Science and Technology · 1973 · 20 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

Electron-beam fabricated GaAs integrated circuits

P.T. Greiling, F. S. Ozdemir, C.F. Krumm et al. · 1979 · 10 citations

Semiconductor Technology, Electrical Engineering, Engineering +12

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