Maximilian Mayer

<title>Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology</title>

Udo Dinger, F. Eisert, Holger Lasser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 37 citations

Optical Materials, Engineering, Electron-beam Lithography +17

Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography

Udo Dinger, Guenther Seitz, S. Schulte et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 22 citations

Scan Machines, Engineering, Electron-beam Lithography +17

On the Energy Consumption and Performance of WebAssembly Binaries across Programming Languages and Runtimes in IoT

Linus Wagner, Maximilian Mayer, Andrea Marino et al. · 2023 · 14 citations · Full text

High-precision interferometric testing of spherical mirrors with long radius of curvature

Klaus Freischlad, Michael F. Kuechel, W. Wiedmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 13 citations

Engineering, Measurement, Real-time Wavefront +17