Statistics
Publications
18
Citations
511
H-Index
13
Active since
1991
Affiliations
J. Frackoviak is an author at Nokia (United States) specializing in engineering, electrical engineering, and semiconductor devices.
Publications per year
1991–2011
18
18
Stable low-stress tungsten absorber technology for sub-half-micron x-ray lithography
R. R. Kola, G. K. Celler, J. Frackoviak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +13
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