J.R. Liefting

Pre-amorphization damage in ion-implanted silicon

R.J. Schreutelkamp, J. S. Custer, J.R. Liefting et al. · Materials Science Reports · 1991 · 134 citations

Ion Implantation, Applied Physics, Amorphous Solid +2

Deformation mechanisms of Al films on oxidized Si wafers

Cynthia A. Volkert, C.F. Alofs, J.R. Liefting · Journal of materials research/Pratt's guide to venture capital sources · 1994 · 57 citations

Materials Engineering, Materials Science, Aluminium Nitride +6

Reduction of secondary defect formation in MeV B+ ion-implanted Si (100)

W.X. Lu, Yiming Qian, Ruoming Tian et al. · Applied Physics Letters · 1989 · 35 citations

Electrical Engineering, Ion Implantation, Engineering +11

Range straggling of MeV ions in amorphous silicon: Discrepancies with TRIM

R.J. Schreutelkamp, J.R. Liefting, P. M. Zagwijn et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 27 citations

Materials Science, Ion Implantation, Mev Ions +9

Reduction of secondary defects in MeV ion-implanted silicon by means of ion beam defect engineering

Zhong-lie Wang, Zhang Bo-Xu, Qing‐Tai Zhao et al. · Journal of Applied Physics · 1992 · 19 citations

Materials Engineering, Defect Tolerance, Electrical Engineering +12