Statistics
Publications
4
Citations
161
H-Index
4
Active since
1990
Affiliations
ShinEtsu Chemical (Japan)(Current)
Atsuo Uchiyama is an author at ShinEtsu Chemical (Japan) specializing in wafer bonding, materials science, and silicon materials.
Publications per year
1990–1993
4
4
Silicon Wafer-Bonding Process Technology for SOI Structures
Tomoyuki Abe, Masatake Nakano, T. Itho et al. · 1990 · 17 citations
1–4 of 4