Statistics
Publications
2
Citations
95
H-Index
2
Active since
1990
Affiliations
ShinEtsu Chemical (Japan)(Current)
Tokio Takei is an author at ShinEtsu Chemical (Japan) specializing in wafer bonding, engineering, and semiconductor device materials.
Publications per year
1990–1990
2
2
Silicon Wafer-Bonding Process Technology for SOI Structures
Tomoyuki Abe, Masatake Nakano, T. Itho et al. · 1990 · 17 citations
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