J. R. Abernathey

Silicon-on-insulator (SOI) by bonding and ETCH-back

J. B. Lasky, S. R. Stiffler, F. White et al. · 1985 · 69 citations

Engineering, Electrical Engineering, Materials Science +17

Electron heating in silicon nitride and silicon oxynitride films

D. J. DiMaria, J. R. Abernathey · Journal of Applied Physics · 1986 · 45 citations

Natural Sciences, Materials Science, Physics +17

Planarization of ULSI Topography over Variable Pattern Densities

T. Daubenspeck, J. DeBrosse, Charles W. Koburger et al. · Journal of The Electrochemical Society · 1991 · 23 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Properties of thin LPCVD silicon oxynitride films

Paihung Pan, J. R. Abernathey, Christian M. Schaefer · Journal of Electronic Materials · 1985 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +12