T. Uchida

Use of a sealed teflon vessel for decomposition followed by the determination of chemical constituents of various marine samplers

Shinichiro Noriki, Keita Nakanishi, T. Furawa et al. · 1980 · 61 citations

Environmental Chemistry, Chemical Constituents, Engineering +12

Anomalous Resistance Induced by Chaos of Electron Motion and its Application to Plasma Production

Zensho Yoshida, H. Asakura, H. Kakuno et al. · Physical Review Letters · 1998 · 46 citations

Plasma Production, Magnetism, Anomalous Resistance Induced +12

Low-k materials etching in magnetic neutral loop discharge plasma

Yasuhiro Morikawa, Shoichiro Yasunami, W. Chen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 44 citations

Materials Science, Low-k Materials, Electrical Engineering +13

Very uniform and high aspect ratio anisotropy SiO2 etching process in magnetic neutral loop discharge plasma

W. Chen, Yasuhiro Morikawa, Masahiro Itoh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 33 citations

Engineering, Electron-beam Lithography, Magnetic Neutral Loop +16

Application of magnetic neutral loop discharge plasma in deep silica etching

W. Chen, K. Sugita, Yasuhiro Morikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 32 citations

Engineering, Plasma Physics, Optical Mems +17