Statistics
Publications
2
Citations
65
H-Index
2
Active since
1999
Affiliations
Ulvac (Japan)(Current)
K. Sugita is an author at Ulvac (Japan) specializing in microelectronics, engineering, and applied physics.
Publications per year
1999–2001
2
2
W. Chen, Yasuhiro Morikawa, Masahiro Itoh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 33 citations
Engineering, Electron-beam Lithography, Magnetic Neutral Loop +16
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