Statistics
Publications
1
Citations
33
H-Index
1
Active since
1999
Affiliations
Ulvac (Japan)(Current)
W. Chen is an author at Ulvac (Japan) specializing in nanotechnology, nanoelectronics, and engineering.
Publications per year
1999–1999
1
1
W. Chen, Yasuhiro Morikawa, Masahiro Itoh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 33 citations
Engineering, Electron-beam Lithography, Magnetic Neutral Loop +16
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