Concepedia

W. Chen

WC

Statistics

Publications

2

Citations

76

H-Index

2

Active since

2001

Affiliations

Ulvac (Japan)(Current)

W. Chen is an author at Ulvac (Japan) specializing in microelectronics, materials science, and engineering.

Top concepts

Publications per year

2001–2001

2

Publications

2

Low-k materials etching in magnetic neutral loop discharge plasma

Yasuhiro Morikawa, Shoichiro Yasunami, W. Chen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 44 citations

, , +13

Application of magnetic neutral loop discharge plasma in deep silica etching

W. Chen, K. Sugita, Yasuhiro Morikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 32 citations

, , +17

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