Concepedia

Tamba Tugbawa

TT

Statistics

Publications

7

Citations

163

H-Index

7

Active since

1999

Affiliations

Massachusetts Institute of Technology(Current)

Tamba Tugbawa is an author at Massachusetts Institute of Technology specializing in engineering, materials science, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMicroelectronicsMechanical EngineeringCorrosion3D PrintingMicrostructureMaterial ProcessingComputer EngineeringElectronic Packaging

Publications per year

1999–2003

7

Publications

7

Modeling of Pattern Dependencies for Multi-Level Copper Chemical-Mechanical Polishing Processes

Tamba Tugbawa, Tae Park, Brian Lee et al. · MRS Proceedings · 2001 · 31 citations

Materials Science, Engineering, Material Processing +11

A Mathematical Model of Pattern Dependencies in Cu CMP Processes

Tamba Tugbawa, Duane S. Boning, Tony S. Pan et al. · 1999 · 29 citations

Pattern Dependent Modeling for CMP Optimization and Control

Duane S. Boning, ByungKun Lee, Charles Oji et al. · MRS Proceedings · 1999 · 29 citations

Pattern Dependent Modeling, Engineering, Model-based Control Technique +6

Pattern dependent modeling of electroplated copper profiles

T.H. Park, Tamba Tugbawa, Duane S. Boning · 2001 · 24 citations

Electrical Engineering, Pattern Dependent Modeling, Engineering +12

Integrated chip-scale simulation of pattern dependencies in copper electroplating and copper chemical mechanical polishing processes

Tamba Tugbawa, T.H. Park, Duane S. Boning · 2003 · 20 citations

Engineering, Industrial Engineering, Mechanical Engineering +24

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