Concepedia

T.H. Park

TP

Statistics

Publications

2

Citations

44

H-Index

2

Active since

2001

Affiliations

Massachusetts Institute of Technology(Current)

T.H. Park is an author at Massachusetts Institute of Technology specializing in microelectronics, electrical engineering, and engineering.

Top concepts

EngineeringMicroelectronicsElectronic PackagingElectrical Engineering3D PrintingMaterial ScienceMicrofabricationMaterial ProcessingMultiscale ModelingComputer Engineering

Publications per year

2001–2003

2

Publications

2

Pattern dependent modeling of electroplated copper profiles

T.H. Park, Tamba Tugbawa, Duane S. Boning · 2001 · 24 citations

Electrical Engineering, Pattern Dependent Modeling, Engineering +12

Integrated chip-scale simulation of pattern dependencies in copper electroplating and copper chemical mechanical polishing processes

Tamba Tugbawa, T.H. Park, Duane S. Boning · 2003 · 20 citations

Engineering, Industrial Engineering, Mechanical Engineering +24

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