Concepedia

Deuk-Chul Kwon

DK

8

Publications

218

Citations

8

H-Index

2011

Active since

Affiliations

Korea Institute of Fusion Energy(Current)

Hanwha Techwin (South Korea)

Jeonbuk National University

Korea Research Institute of Standards and Science

Chungnam National University

Deuk-Chul Kwon is an author at Korea Institute of Fusion Energy specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsPlasma PhysicsSurface SciencePlasma ScienceNatural SciencesPlasma SimulationChemical EngineeringElectrical Engineering

Publications per year

2011–2022

8

Publications

8

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Min Young Yoon, H. J. Yeom, Jung‐Hyung Kim et al. · Physics of Plasmas · 2021 · 57 citations · Full text

Electrical Engineering, Chemical Engineering, Engineering +14

Evolution of electron temperature in inductively coupled plasma

Hyo‐Chang Lee, Byonghoon Seo, Deuk-Chul Kwon et al. · Applied Physics Letters · 2017 · 40 citations

Engineering, Radio Frequency, Physics +9

A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

Deuk-Chul Kwon, Won Seok Chang, Min Park et al. · Journal of Applied Physics · 2011 · 36 citations

Engineering, Glow Discharge, Plasma Physics +16

Total ionization cross section of cyclic organic molecules

Dhanoj Gupta, Heechol Choi, Suvam Singh et al. · The Journal of Chemical Physics · 2019 · 30 citations

Fast and realistic 3D feature profile simulation platform for plasma etching process

Yeong Geun Yook, Hae Sung You, Jae‐Hyeong Park et al. · Journal of Physics D Applied Physics · 2022 · 18 citations

Engineering, Realistic 3D, Computer-aided Design +25

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