Concepedia

Yeong Geun Yook

YG

Statistics

Publications

2

Citations

35

H-Index

2

Active since

2020

Affiliations

Korea Institute of Fusion Energy(Current)

Hanwha Techwin (South Korea)

Jeonbuk National University

Yeong Geun Yook is an author at Korea Institute of Fusion Energy specializing in surface science, plasma-surface reactions, and etching processes.

Publications per year

2020–2022

2

Publications

2

Fast and realistic 3D feature profile simulation platform for plasma etching process

Yeong Geun Yook, Hae Sung You, Jae‐Hyeong Park et al. · Journal of Physics D Applied Physics · 2022 · 22 citations

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A unified semi-global surface reaction model of polymer deposition and SiO2 etching in fluorocarbon plasma

Won-Seok Chang, Yeong Geun Yook, Hae Sung You et al. · Applied Surface Science · 2020 · 13 citations

, , +16

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