Statistics
Publications
3
Citations
48
H-Index
3
Active since
1999
Affiliations
Toyo University(Current)
M. Ozawa is an author at Toyo University specializing in surface science, materials science, and plasma etching.
Publications per year
1999–2003
3
3
Yasuhiko Chinzei, Yannick Feurprier, M. Ozawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +15
Etching characteristics of porous silica (k=1.9) in neutral loop discharge plasma
Yasuhiro Morikawa, Naoki Mizutani, M. Ozawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 13 citations
Natural Sciences, Materials Engineering, Materials Science +12
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