Concepedia

P. E. Mauger

PE

4

Publications

68

Citations

4

H-Index

1988

Active since

Affiliations

Micron (United States)(Current)

P. E. Mauger is an author at Micron (United States) specializing in surface science, applied physics, and materials science.

Top concepts

Publications per year

1988–2006

4

Publications

4

Advanced electron cyclotron resonance chemical vapor deposition SiC coatings and x-ray mask membranes

A. R. Shimkunas, P. E. Mauger, L. Bourget et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 26 citations

, , +17

Observation of quantum interference effect in solids

A. Tavkhelidze, Amiran Bibilashvili, Larissa Jangidze et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 15 citations · Full text

, , +16

Radiation damage in boron nitride x-ray lithography masks

Paul L. King, Lawrence S. Pan, P. Pianetta et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 14 citations

, , +18

Silicon stencil masks for lithography below 0.25 μm by ion-projection exposure

P. E. Mauger, A. R. Shimkunas, J. C. Wolfe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 13 citations

, , +19

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