Concepedia

Hiroyuki Iwaki

HI

Statistics

Publications

4

Citations

115

H-Index

4

Active since

2012

Affiliations

Tokyo Electron (Japan)(Current)

Hiroyuki Iwaki is an author at Tokyo Electron (Japan) specializing in microfabrication, engineering, and directed self-assembly.

Publications per year

2012–2015

4

Publications

4

Pattern scaling with directed self assembly through lithography and etch process integration

Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations

Engineering, Materials Engineering, Materials Science +16

Advances in directed self assembly integration and manufacturability at 300 mm

Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +15

High-volume manufacturing equipment and processing for directed self-assembly applications

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations

Engineering, Materials Engineering, Materials Science +11

Driving DSA into volume manufacturing

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 14 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

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