Concepedia

Shuuji Hirano

SH

Statistics

Publications

3

Citations

51

H-Index

3

Active since

2006

Affiliations

Fujifilm (Japan)(Current)

Shuuji Hirano is an author at Fujifilm (Japan) specializing in microelectronics, engineering, and chemical engineering.

Top concepts

EngineeringMicroelectronicsPolymer ScienceMaterial SciencePolymer ChemistryChemical EngineeringHealthChemistryRadiologyMicroscopy

Publications per year

2006–2013

3

Publications

3

Reduction of the Outgassing Segments and LWR Improvement for the Next Generation EUV Lithography

Seiya Masuda, Shinji Tarutani, Sou Kamimura et al. · Journal of Photopolymer Science and Technology · 2007 · 19 citations · Full text

Electrical Engineering, Chemical Engineering, Engineering +14

Negative Tone Imaging Process and Materials for EUV Lithography

Shinji Tarutani, Wataru Nihashi, Shuuji Hirano et al. · Journal of Photopolymer Science and Technology · 2013 · 17 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +17

The material design to reduce outgassing in acetal-based chemically amplified resist for EUV lithography

Seiya Masuda, Yasutomo Kawanishi, Shuuji Hirano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 15 citations

Engineering, Electron-beam Lithography, Euv Lithography +21

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