Toshimitsu Akane

Nonalloy Ohmic contact fabrication in a hydrothermally grown <i>n</i>-ZnO (0001) substrate by KrF excimer laser irradiation

Toshimitsu Akane, Koji Sugioka, Katsumi Midorikawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 47 citations

Engineering, Materials Engineering, Materials Science +16

Influence of laser fluence and irradiation timing of F 2 laser on ablation properties of fused silica in F 2 -KrF excimer laser multi-wavelength excitation process

Kotaro Obata, Koji Sugioka, Toshimitsu Akane et al. · Applied Physics A · 2001 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

KrF excimer laser induced ablation–planarization of GaN surface

Toshimitsu Akane, Koji Sugioka, Hirotaka Ogino et al. · Applied Surface Science · 1999 · 24 citations

Natural Sciences, Materials Science, Physics +14

Two-Step Doping Using Excimer Laser in Boron Doping of Silicon

Toshimitsu Akane, T. Nii, Satoru Matumoto · Japanese Journal of Applied Physics · 1992 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials

Koji Sugioka, Toshimitsu Akane, Kotaro Obata et al. · Applied Surface Science · 2002 · 18 citations

Engineering, Materials Engineering, Materials Science +16