Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials

One-step microfabrication of fused silica by laser ablation of an organic solution

J. Wang, Hiroyuki Niino, A. Yabe · Applied Physics A · 1999 · 217 citations

Engineering, Materials Engineering, Materials Science +10

Micromachining of quartz with ultrashort laser pulses

H. Varel, David Ashkenasi, A. Rosenfeld et al. · Applied Physics A · 1997 · 210 citations

Engineering, Materials Science, Physics +12

Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser

Jie Zhang, Koji Sugioka, Katsumi Midorikawa · Optics Letters · 1998 · 99 citations

Engineering, Materials Engineering, Materials Science +14

Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd + :YAG laser

J. Zhang, Koji Sugioka, Katsumi Midorikawa · Applied Physics A · 1998 · 87 citations

Natural Sciences, Materials Science, Physics +15

Precise microfabrication of wide band gap semiconductors (SiC and GaN) by VUV–UV multiwavelength laser ablation

J. Zhang, Koji Sugioka, Satoshi Wada et al. · Applied Surface Science · 1998 · 48 citations

Engineering, Materials Engineering, Materials Science +14