Concepedia

Artem A. Osipov

AA

11

Publications

229

Citations

10

H-Index

2017

Active since

Affiliations

Peter the Great St. Petersburg Polytechnic University(Current)

Institute of Mineralogy

Karlsruhe Institute of Technology

Saint Petersburg Academic University

Artem A. Osipov is an author at Peter the Great St. Petersburg Polytechnic University specializing in applied physics, engineering, and materials science.

ORCID

Top concepts

Publications per year

2017–2023

11

Publications

11

High-temperature etching of SiC in SF6/O2 inductively coupled plasma

Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova et al. · Scientific Reports · 2020 · 59 citations · Full text

Development of controlled nanosphere lithography technology

Artem A. Osipov, Alina E. Gagaeva, Anastasiya Speshilova et al. · Scientific Reports · 2023 · 29 citations · Full text

Etching of SiC in Low Power Inductively-Coupled Plasma

Artem A. Osipov, Yu. V. Solov’ev, A A Uvarov et al. · Russian Microelectronics · 2018 · 24 citations

Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching

Artem A. Osipov, Gleb A. Iankevich, Sergey Alexandrov · Plasma Chemistry and Plasma Processing · 2019 · 23 citations

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The effect of a lithium niobate heating on the etching rate in SF<sub>6</sub> ICP plasma

Artem A. Osipov, Sergey Alexandrov, Gleb A. Iankevich · Materials Research Express · 2018 · 17 citations

, , +13

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