Concepedia

Anastasia B. Speshilova

AB

2

Publications

74

Citations

2

H-Index

2020

Active since

Affiliations

Institute of Mineralogy(Current)

Karlsruhe Institute of Technology

Peter the Great St. Petersburg Polytechnic University

Anastasia B. Speshilova is an author at Institute of Mineralogy.

Publications per year

2020–2022

2

Publications

2

High-temperature etching of SiC in SF6/O2 inductively coupled plasma

Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova et al. · Scientific Reports · 2020 · 59 citations · Full text

OES diagnostics as a universal technique to control the Si etching structures profile in ICP

Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova et al. · Scientific Reports · 2022 · 15 citations · Full text

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