Concepedia

Gleb A. Iankevich

GA

8

Publications

198

Citations

8

H-Index

2018

Active since

Affiliations

Karlsruhe Institute of Technology(Current)

Peter the Great St. Petersburg Polytechnic University

Institute of Mineralogy

Saint Petersburg Academic University

Gleb A. Iankevich is an author at Karlsruhe Institute of Technology specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

2018–2022

8

Publications

8

High-temperature etching of SiC in SF6/O2 inductively coupled plasma

Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova et al. · Scientific Reports · 2020 · 59 citations · Full text

High Entropy Approach to Engineer Strongly Correlated Functionalities in Manganites

Abhishek Sarkar, Di Wang, Mohana V. Kante et al. · Advanced Materials · 2022 · 49 citations · Full text

Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching

Artem A. Osipov, Gleb A. Iankevich, Sergey Alexandrov · Plasma Chemistry and Plasma Processing · 2019 · 23 citations

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The effect of a lithium niobate heating on the etching rate in SF<sub>6</sub> ICP plasma

Artem A. Osipov, Sergey Alexandrov, Gleb A. Iankevich · Materials Research Express · 2018 · 17 citations

, , +13

OES diagnostics as a universal technique to control the Si etching structures profile in ICP

Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova et al. · Scientific Reports · 2022 · 15 citations · Full text

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