1
Publications
24
Citations
1
H-Index
2018
Active since
Affiliations
A A Uvarov is an author at Peter the Great St. Petersburg Polytechnic University.
Publications per year
2018–2018
1
1
Etching of SiC in Low Power Inductively-Coupled Plasma
Artem A. Osipov, Yu. V. Solov’ev, A A Uvarov et al. · Russian Microelectronics · 2018 · 24 citations
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