Statistics
Publications
1
Citations
21
H-Index
1
Active since
2003
Affiliations
University of Salford(Current)
R.G. Goldberg is an author at University of Salford specializing in damage accumulation, implantation-induced defect formation, and surface passivation.
Publications per year
2003–2003
1
1
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
M. Werner, D.G. Armour, W VANDERVORST et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 21 citations · Full text
Engineering, Electrical Engineering, Materials Engineering +12
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