Shuhei Kodama - Concepedia

Author

Shuhei Kodama

Tohoku University ORCID

Also Known As

S. Kodama, Shuhei KODAMA, Shuhei Kodama, Tanaka, N.

Publications

231

Citations

H-Index

Concepts

All Affiliations

Tohoku University Tokyo Institute of Technology Dai Nippon Printing (Japan)Disco (japan)Fujitsu (Japan)

About

Shuhei Kodama is an author at Tohoku University specializing in engineering, applied physics, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	8	8	139
2	Applied Physics	6	6	113
3	Electrical Engineering	4	4	81
4	Materials Science	4	4	84
5	Computer Engineering	1	1	33

Shuhei Kodama

Publications

139

Citations

H-Index

Page 1

	Year	Citations
Ultra thinning down to 4-&#x00B5;m using 300-mm wafer proven by 40-nm node 2Gb DRAM for 3D multi-stack WOW applications Y. S. Kim, Shuhei Kodama, Y. Mizushima, EngineeringEmerging Memory TechnologyIntegrated Circuits40-Nm Node 2GbWafer Scale Processing	2014	33
A robust wafer thinning down to 2.6-μm for bumpless interconnects and DRAM WOW applications Y. S. Kim, Shuhei Kodama, Y. Mizushima, EngineeringThin Film Process TechnologyInterconnect (Integrated Circuits)Cu ContaminationWafer Scale Processing	2015	19
Optimization of Via Bottom Cleaning for Bumpless Interconnects and Wafer-on-Wafer (WOW) Integration Y. S. Kim, Shuhei Kodama, Y. Mizushima, EngineeringDry ProcessIntegrated Circuits300-Mm Wafer-on-waferSilicon On Insulator	2018	18
Control of short-pulsed laser induced periodic surface structures with machining - Picosecond laser micro/nanotexturing with ultraprecision cutting Shuhei Kodama, Shinya Suzuki, Kazuya Hayashibe, Precision Engineering Materials SciencePeriodic Surface StructuresAdvanced Laser ProcessingEngineeringMicrofabrication	2018	17
Postbuckling behavior of circular cylindrical shells under compression Noboru YAMAKI, Shuhei Kodama International Journal of Non-Linear Mechanics EngineeringMechanicsShell TheoryMechanical EngineeringSolid Mechanics	1976	15
Control of short-pulsed laser induced periodic surface structures with machining -picosecond laser nanotexturing with magnetic abrasive finishing- Shuhei Kodama, Hitomi Yamaguchi, Keita Shimada, Precision Engineering Materials SciencePeriodic Surface StructuresAdvanced Laser ProcessingEngineeringMicrofabrication	2019	15
Postbuckling behavior of pressurized circular cylindrical shells under torsion—I. Experiment Shuhei Kodama, Kohei Otomo, Noboru YAMAKI International Journal of Non-Linear Mechanics EngineeringMechanicsMechanical EngineeringSolid MechanicsShell Structure	1981	11
Electrical characteristics of bumpless interconnects for through silicon via (TSV) and Wafer-On-Wafer (WOW) integration Y. S. Kim, Shuhei Kodama, Noritoshi Maeda, EngineeringDevice IntegrationInterconnect (Integrated Circuits)Electrical CharacteristicsWafer Scale Processing	2016	11

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