E. Beck

Hydrogen plasma chemical cleaning of metallic substrates and silicon wafers

Norman Korner, E. Beck, Alex Dommann et al. · Surface and Coatings Technology · 1995 · 82 citations

Materials Science, Chemical Engineering, Engineering +10

The Role of Surface Chemistry in Bonding of Standard Silicon Wafers

Qiaoling Tong, T.‐H. Lee, U. Gösele et al. · Journal of The Electrochemical Society · 1997 · 68 citations

Engineering, Chemistry, Silicon On Insulator +16

Low-temperature in situ cleaning of silicon wafers with an ultra high vacuum compatible plasma source

J. Ramm, E. Beck, A. Züger et al. · Thin Solid Films · 1992 · 25 citations

Electrical Engineering, Silicon Wafers, Engineering +8

Hydrogen cleaning of silicon wafers. Investigation of the wafer surface after plasma treatment

J. Ramm, E. Beck, Albert Zueger et al. · Thin Solid Films · 1993 · 25 citations

Chemical Engineering, Wafer Scale Processing, Engineering +8

Low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers

J. Ramm, E. Beck, Alex Dommann et al. · Thin Solid Films · 1994 · 24 citations

Materials Science, Wafer Scale Processing, Engineering +6