Concepedia
Statistics
Publications
7
Citations
248
H-Index
Active since
1988
Affiliations
Oerlikon (Liechtenstein)(Current)
Interstate University of Applied Sciences of Technology Buchs
University of Zurich
E. Beck is an author at Oerlikon (Liechtenstein) specializing in materials engineering, materials science, and engineering.
Publications per year
1988–2021
Hydrogen plasma chemical cleaning of metallic substrates and silicon wafers
Norman Korner, E. Beck, Alex Dommann et al. · Surface and Coatings Technology · 1995 · 82 citations
Engineering, Materials Engineering, Materials Science +16
The Role of Surface Chemistry in Bonding of Standard Silicon Wafers
Qiaoling Tong, T.‐H. Lee, U. Gösele et al. · Journal of The Electrochemical Society · 1997 · 69 citations
Engineering, Materials Engineering, Materials Science +17
Low-temperature in situ cleaning of silicon wafers with an ultra high vacuum compatible plasma source
J. Ramm, E. Beck, A. Züger et al. · Thin Solid Films · 1992 · 25 citations
Engineering, Electrical Engineering, Physics +14
Hydrogen cleaning of silicon wafers. Investigation of the wafer surface after plasma treatment
J. Ramm, E. Beck, Albert Zueger et al. · Thin Solid Films · 1993 · 25 citations
Engineering, Materials Engineering, Materials Science +15
Low temperature epitaxial growth by molecular beam epitaxy on hydrogen-plasma-cleaned silicon wafers
J. Ramm, E. Beck, Alex Dommann et al. · Thin Solid Films · 1994 · 24 citations
1–5 of 7